Investigating defect inspection and sensitivity analysis for MoSi-based PSMs

Jerry X. Chen, Robert K. Henderson, Franklin Kalk

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)29-36
Number of pages8
JournalMICRO
Volume18
Issue number4
StatePublished - Apr 2000
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • General Materials Science
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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